JPH041301B2 - - Google Patents

Info

Publication number
JPH041301B2
JPH041301B2 JP58017381A JP1738183A JPH041301B2 JP H041301 B2 JPH041301 B2 JP H041301B2 JP 58017381 A JP58017381 A JP 58017381A JP 1738183 A JP1738183 A JP 1738183A JP H041301 B2 JPH041301 B2 JP H041301B2
Authority
JP
Japan
Prior art keywords
gas detection
heater
gas
electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58017381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59143946A (ja
Inventor
Junji Manaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Seiki Co Ltd
Original Assignee
Ricoh Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Seiki Co Ltd filed Critical Ricoh Seiki Co Ltd
Priority to JP1738183A priority Critical patent/JPS59143946A/ja
Priority to CA000446823A priority patent/CA1216330A/en
Priority to US06/577,858 priority patent/US4580439A/en
Publication of JPS59143946A publication Critical patent/JPS59143946A/ja
Priority to US06/838,289 priority patent/US4740387A/en
Publication of JPH041301B2 publication Critical patent/JPH041301B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP1738183A 1983-02-07 1983-02-07 ガス検出装置 Granted JPS59143946A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1738183A JPS59143946A (ja) 1983-02-07 1983-02-07 ガス検出装置
CA000446823A CA1216330A (en) 1983-02-07 1984-02-06 Low power gas detector
US06/577,858 US4580439A (en) 1983-02-07 1984-02-07 Low power gas detector
US06/838,289 US4740387A (en) 1983-02-07 1986-03-10 Low power gas detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1738183A JPS59143946A (ja) 1983-02-07 1983-02-07 ガス検出装置

Publications (2)

Publication Number Publication Date
JPS59143946A JPS59143946A (ja) 1984-08-17
JPH041301B2 true JPH041301B2 (en]) 1992-01-10

Family

ID=11942423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1738183A Granted JPS59143946A (ja) 1983-02-07 1983-02-07 ガス検出装置

Country Status (1)

Country Link
JP (1) JPS59143946A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210262967A1 (en) * 2018-06-08 2021-08-26 Omron Corporation Micro-hotplate and mems gas sensor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6295454A (ja) * 1985-10-22 1987-05-01 Nippon Telegr & Teleph Corp <Ntt> マイクロガスセンサおよびその製造方法
JPH079411B2 (ja) * 1986-03-24 1995-02-01 リコ−精器株式会社 雰囲気検出装置
JPS62287142A (ja) * 1986-06-05 1987-12-14 Matsushita Electric Ind Co Ltd ガスセンサ
DE4314888C1 (de) * 1993-05-05 1994-08-18 Ignaz Eisele Verfahren zum Abscheiden einer ganzflächigen Schicht durch eine Maske und optionalem Verschließen dieser Maske
DE10029012C2 (de) * 2000-06-13 2002-06-06 Amtec Gmbh Mikrostruktur und Verfahren zu deren Herstellung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2221811A1 (de) * 1972-05-04 1973-11-22 Bayer Ag Verfahren zur herstellung von flammfesten urethangruppen aufweisenden schaumstoffen
JPS5374495A (en) * 1976-12-14 1978-07-01 Marukon Denshi Kk Gas responsive element
JPS5618752A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Driving method for sensor
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
JPS56109047U (en]) * 1980-01-23 1981-08-24
JPS5794641A (en) * 1980-12-04 1982-06-12 Ricoh Co Ltd Manufacture of electric heater
JPS58103654A (ja) * 1981-12-16 1983-06-20 Matsushita Electric Ind Co Ltd 多機能ガスセンサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210262967A1 (en) * 2018-06-08 2021-08-26 Omron Corporation Micro-hotplate and mems gas sensor

Also Published As

Publication number Publication date
JPS59143946A (ja) 1984-08-17

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